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The opposite effects of substrate bias voltage and nitrogen-argon flow ratio upon the formation of copper (Cu)/copper nitride (Cu₃N) phase in XRD patterns of Cu₃N films deposited by a sputtering method
17 Dec, 2020

The opposite effects of substrate bias voltage and nitrogen-argon flow ratio upon the formation of copper (Cu)/copper nitride (Cu₃N) phase in XRD patterns of Cu₃N films deposited by a sputtering method
Author: Ali Kosari Mehr
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